JPS62190337U - - Google Patents
Info
- Publication number
- JPS62190337U JPS62190337U JP7823186U JP7823186U JPS62190337U JP S62190337 U JPS62190337 U JP S62190337U JP 7823186 U JP7823186 U JP 7823186U JP 7823186 U JP7823186 U JP 7823186U JP S62190337 U JPS62190337 U JP S62190337U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- core tube
- furnace core
- rails
- semiconductor heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 10
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7823186U JPS62190337U (en]) | 1986-05-26 | 1986-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7823186U JPS62190337U (en]) | 1986-05-26 | 1986-05-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62190337U true JPS62190337U (en]) | 1987-12-03 |
Family
ID=30926982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7823186U Pending JPS62190337U (en]) | 1986-05-26 | 1986-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62190337U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0357931U (en]) * | 1989-10-11 | 1991-06-05 |
-
1986
- 1986-05-26 JP JP7823186U patent/JPS62190337U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0357931U (en]) * | 1989-10-11 | 1991-06-05 |